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Plasma-Surface Interaction Data Set 547

Sputtering of W+ on W(pc) at 300 K

  1. B152: M. Saidoh, K. Sone, "Low Energy Selfsputtering Yields of Molybdenum and Tungsten ", Japanese Journal of Applied Physics 22, 1361 (1983). [10.1143/jjap.22.1361]

Sputtering of W+ on W(pc) at 300 K

angle = 0.0 deg E /eV P
100.00.133
247.00.2326
477.00.5901
956.00.7658
1920.01.339
4730.03.396