{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "W+", "charge": 1}, "temperature": 300, "comment": "", "refs": [{"id": 152, "authors": "M. Saidoh, K. Sone", "title": "Low Energ Self-Sputtering Yields of Molybdenum and Tungsten", "journal": "Japanese Journal of Applied Physics", "volume": "22", "page_start": "1361", "page_end": "", "article_number": "", "year": 1983, "note": "", "doi": "10.1143/jjap.22.1361", "bibcode": "1983JaJAP..22.1361S", "url": "https://dx.doi.org/10.1143/JJAP.22.1361"}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"1.00e+02": {"P": 0.133}, "2.47e+02": {"P": 0.2326}, "4.77e+02": {"P": 0.5901}, "9.56e+02": {"P": 0.7658}, "1.92e+03": {"P": 1.339}, "4.73e+03": {"P": 3.396}}}}]}