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Plasma-Surface Interaction Data Set 533

Sputtering of 4He+ on B(pc) at 300 K

  1. B145: S. Miyagawa, Y. Ato, Y. Moriya, "Sputtering yields of boron bombarded by light ions ", Journal of Applied Physics 49, 6194-6196 (1978). [10.1063/1.324522]

Sputtering of 4He+ on B(pc) at 300 K

angle = 0.0 deg E /eV P
31400.00.0157
51200.00.009968
70400.00.007662
106000.00.006034
152000.00.004985