{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "B", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "", "refs": [{"id": 145, "authors": "S. Miyagawa, Y. Ato, Y. Moriya", "title": "Sputtering yields of boron bombarded by light ions", "journal": "Journal of Applied Physics", "volume": "49", "page_start": "6194", "page_end": "6196", "article_number": "", "year": 1978, "note": "", "doi": "10.1063/1.324522", "bibcode": "1978JAP....49.6194M", "url": "https://dx.doi.org/10.1063/1.324522"}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"3.14e+04": {"P": 0.0157}, "5.12e+04": {"P": 0.009968}, "7.04e+04": {"P": 0.007662}, "1.06e+05": {"P": 0.006034}, "1.52e+05": {"P": 0.004985}}}}]}