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Plasma-Surface Interaction Data Set 526

Sputtering of 4He+ on U(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on U(pc) at 300 K

angle = 0.0 deg E /eV P
95.361.567e-29
109.90.0001428
126.70.0005797
146.00.001424
168.20.002794
193.90.004759
223.50.007286
257.60.01023
296.80.01337
342.10.01649
394.30.01943
454.40.02211
523.70.02451
603.60.02666
695.70.0286
801.80.03036
924.00.03197
1065.00.03346
1227.00.03484
1415.00.03614
1630.00.03735
1879.00.03848
2166.00.03953
2496.00.0405
2876.00.04137
3315.00.04215
3821.00.04283
4403.00.0434
5075.00.04385
5849.00.04417
6741.00.04437
7769.00.04442
8954.00.04433
10320.00.04409
11890.00.0437
13710.00.04315
15800.00.04245
18210.00.0416
20980.00.04061
24180.00.03949
27870.00.03825
32120.00.03689
37020.00.03544
42670.00.03391
49180.00.03232
56680.00.03069
65320.00.02903
75290.00.02736
86770.00.02569

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 95.36 – 100000