{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on U(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0839, "q": 0.1136, "mu": 1.678, "epsilonL": 3.71e-05, "Eth": 95.36}, "E_min": 95.36, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
95.36	1.567e-29	
109.9	0.0001428	
126.7	0.0005797	
146.0	0.001424	
168.2	0.002794	
193.9	0.004759	
223.5	0.007286	
257.6	0.01023	
296.8	0.01337	
342.1	0.01649	
394.3	0.01943	
454.4	0.02211	
523.7	0.02451	
603.6	0.02666	
695.7	0.0286	
801.8	0.03036	
924.0	0.03197	
1065.0	0.03346	
1227.0	0.03484	
1415.0	0.03614	
1630.0	0.03735	
1879.0	0.03848	
2166.0	0.03953	
2496.0	0.0405	
2876.0	0.04137	
3315.0	0.04215	
3821.0	0.04283	
4403.0	0.0434	
5075.0	0.04385	
5849.0	0.04417	
6741.0	0.04437	
7769.0	0.04442	
8954.0	0.04433	
10320.0	0.04409	
11890.0	0.0437	
13710.0	0.04315	
15800.0	0.04245	
18210.0	0.0416	
20980.0	0.04061	
24180.0	0.03949	
27870.0	0.03825	
32120.0	0.03689	
37020.0	0.03544	
42670.0	0.03391	
49180.0	0.03232	
56680.0	0.03069	
65320.0	0.02903	
75290.0	0.02736	
86770.0	0.02569	
-----