{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "U", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"95.36": {"P": 1.567e-29}, "109.9": {"P": 0.0001428}, "126.7": {"P": 0.0005797}, "146.0": {"P": 0.001424}, "168.2": {"P": 0.002794}, "193.9": {"P": 0.004759}, "223.5": {"P": 0.007286}, "257.6": {"P": 0.01023}, "296.8": {"P": 0.01337}, "342.1": {"P": 0.01649}, "394.3": {"P": 0.01943}, "454.4": {"P": 0.02211}, "523.7": {"P": 0.02451}, "603.6": {"P": 0.02666}, "695.7": {"P": 0.0286}, "801.8": {"P": 0.03036}, "924.0": {"P": 0.03197}, "1065.0": {"P": 0.03346}, "1227.0": {"P": 0.03484}, "1415.0": {"P": 0.03614}, "1630.0": {"P": 0.03735}, "1879.0": {"P": 0.03848}, "2166.0": {"P": 0.03953}, "2496.0": {"P": 0.0405}, "2876.0": {"P": 0.04137}, "3315.0": {"P": 0.04215}, "3821.0": {"P": 0.04283}, "4403.0": {"P": 0.0434}, "5075.0": {"P": 0.04385}, "5849.0": {"P": 0.04417}, "6741.0": {"P": 0.04437}, "7769.0": {"P": 0.04442}, "8954.0": {"P": 0.04433}, "10320.0": {"P": 0.04409}, "11890.0": {"P": 0.0437}, "13710.0": {"P": 0.04315}, "15800.0": {"P": 0.04245}, "18210.0": {"P": 0.0416}, "20980.0": {"P": 0.04061}, "24180.0": {"P": 0.03949}, "27870.0": {"P": 0.03825}, "32120.0": {"P": 0.03689}, "37020.0": {"P": 0.03544}, "42670.0": {"P": 0.03391}, "49180.0": {"P": 0.03232}, "56680.0": {"P": 0.03069}, "65320.0": {"P": 0.02903}, "75290.0": {"P": 0.02736}, "86770.0": {"P": 0.02569}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0839, "q": 0.1136, "mu": 1.678, "epsilonL": 3.71e-05, "Eth": 95.36}, "E_min": 95.36, "E_max": 100000}}]}