pwiDB

Plasma-Surface Interaction Data Set 520

Sputtering of Ne⁺ on Th(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Th(pc) at 300 K

angle = 0.0 deg	E /eV	P
	30.78	4.325e-28
	36.3	0.0004634
	42.82	0.001883
	50.5	0.004779
	59.56	0.009907
	70.25	0.01818
	82.85	0.0305
	97.72	0.04752
	115.2	0.06933
	135.9	0.09536
	160.3	0.1245
	189.1	0.1556
	223.0	0.1875
	263.0	0.2195
	310.2	0.2515
	365.8	0.2832
	431.5	0.3149
	508.9	0.3468
	600.2	0.379
	707.9	0.4117
	834.9	0.4451
	984.7	0.4792
	1161.0	0.5141
	1370.0	0.5498
	1616.0	0.5861
	1905.0	0.6231
	2247.0	0.6605
	2650.0	0.6983
	3126.0	0.7363
	3687.0	0.7742
	4348.0	0.8119
	5128.0	0.849
	6049.0	0.8854
	7134.0	0.9207
	8414.0	0.9546
	9923.0	0.9869
	11700.0	1.017
	13800.0	1.045
	16280.0	1.07
	19200.0	1.092
	22650.0	1.111
	26710.0	1.126
	31500.0	1.137
	37150.0	1.143
	43820.0	1.144
	51680.0	1.14
	60950.0	1.132
	71890.0	1.117
	84790.0	1.098

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0592
q = 2.926
mu = 1.607
epsilonL = 6.689e-06
Eth = 30.78

Fit range

E = 30.78 – 100000