{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ne+ on Th(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0592, "q": 2.926, "mu": 1.607, "epsilonL": 6.689e-06, "Eth": 30.78}, "E_min": 30.78, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
30.78	4.325e-28	
36.3	0.0004634	
42.82	0.001883	
50.5	0.004779	
59.56	0.009907	
70.25	0.01818	
82.85	0.0305	
97.72	0.04752	
115.2	0.06933	
135.9	0.09536	
160.3	0.1245	
189.1	0.1556	
223.0	0.1875	
263.0	0.2195	
310.2	0.2515	
365.8	0.2832	
431.5	0.3149	
508.9	0.3468	
600.2	0.379	
707.9	0.4117	
834.9	0.4451	
984.7	0.4792	
1161.0	0.5141	
1370.0	0.5498	
1616.0	0.5861	
1905.0	0.6231	
2247.0	0.6605	
2650.0	0.6983	
3126.0	0.7363	
3687.0	0.7742	
4348.0	0.8119	
5128.0	0.849	
6049.0	0.8854	
7134.0	0.9207	
8414.0	0.9546	
9923.0	0.9869	
11700.0	1.017	
13800.0	1.045	
16280.0	1.07	
19200.0	1.092	
22650.0	1.111	
26710.0	1.126	
31500.0	1.137	
37150.0	1.143	
43820.0	1.144	
51680.0	1.14	
60950.0	1.132	
71890.0	1.117	
84790.0	1.098	
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