{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"30.78": {"P": 4.325e-28}, "36.3": {"P": 0.0004634}, "42.82": {"P": 0.001883}, "50.5": {"P": 0.004779}, "59.56": {"P": 0.009907}, "70.25": {"P": 0.01818}, "82.85": {"P": 0.0305}, "97.72": {"P": 0.04752}, "115.2": {"P": 0.06933}, "135.9": {"P": 0.09536}, "160.3": {"P": 0.1245}, "189.1": {"P": 0.1556}, "223.0": {"P": 0.1875}, "263.0": {"P": 0.2195}, "310.2": {"P": 0.2515}, "365.8": {"P": 0.2832}, "431.5": {"P": 0.3149}, "508.9": {"P": 0.3468}, "600.2": {"P": 0.379}, "707.9": {"P": 0.4117}, "834.9": {"P": 0.4451}, "984.7": {"P": 0.4792}, "1161.0": {"P": 0.5141}, "1370.0": {"P": 0.5498}, "1616.0": {"P": 0.5861}, "1905.0": {"P": 0.6231}, "2247.0": {"P": 0.6605}, "2650.0": {"P": 0.6983}, "3126.0": {"P": 0.7363}, "3687.0": {"P": 0.7742}, "4348.0": {"P": 0.8119}, "5128.0": {"P": 0.849}, "6049.0": {"P": 0.8854}, "7134.0": {"P": 0.9207}, "8414.0": {"P": 0.9546}, "9923.0": {"P": 0.9869}, "11700.0": {"P": 1.017}, "13800.0": {"P": 1.045}, "16280.0": {"P": 1.07}, "19200.0": {"P": 1.092}, "22650.0": {"P": 1.111}, "26710.0": {"P": 1.126}, "31500.0": {"P": 1.137}, "37150.0": {"P": 1.143}, "43820.0": {"P": 1.144}, "51680.0": {"P": 1.14}, "60950.0": {"P": 1.132}, "71890.0": {"P": 1.117}, "84790.0": {"P": 1.098}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0592, "q": 2.926, "mu": 1.607, "epsilonL": 6.689e-06, "Eth": 30.78}, "E_min": 30.78, "E_max": 100000}}]}