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Plasma-Surface Interaction Data Set 519

Sputtering of 4He+ on Th(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Th(pc) at 300 K

angle = 0.0 deg E /eV P
103.54.19e-27
119.10.0001347
137.00.000498
157.70.001169
181.40.00226
208.70.003886
240.20.006139
276.30.00905
318.00.01256
365.80.01651
420.90.02069
484.30.02487
557.20.02888
641.20.0326
737.70.03598
848.80.03902
976.60.04175
1124.00.04419
1293.00.0464
1488.00.04839
1712.00.05019
1969.00.05183
2266.00.05331
2607.00.05463
3000.00.05581
3451.00.05684
3971.00.05772
4569.00.05843
5257.00.05898
6048.00.05935
6959.00.05954
8007.00.05954
9213.00.05935
10600.00.05895
12200.00.05836
14030.00.05756
16150.00.05657
18580.00.05538
21370.00.05401
24590.00.05247
28300.00.05077
32560.00.04893
37460.00.04698
43100.00.04493
49590.00.0428
57060.00.04062
65650.00.03842
75540.00.0362
86910.00.03399

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 103.5 – 100000