{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"103.5": {"P": 4.19e-27}, "119.1": {"P": 0.0001347}, "137.0": {"P": 0.000498}, "157.7": {"P": 0.001169}, "181.4": {"P": 0.00226}, "208.7": {"P": 0.003886}, "240.2": {"P": 0.006139}, "276.3": {"P": 0.00905}, "318.0": {"P": 0.01256}, "365.8": {"P": 0.01651}, "420.9": {"P": 0.02069}, "484.3": {"P": 0.02487}, "557.2": {"P": 0.02888}, "641.2": {"P": 0.0326}, "737.7": {"P": 0.03598}, "848.8": {"P": 0.03902}, "976.6": {"P": 0.04175}, "1124.0": {"P": 0.04419}, "1293.0": {"P": 0.0464}, "1488.0": {"P": 0.04839}, "1712.0": {"P": 0.05019}, "1969.0": {"P": 0.05183}, "2266.0": {"P": 0.05331}, "2607.0": {"P": 0.05463}, "3000.0": {"P": 0.05581}, "3451.0": {"P": 0.05684}, "3971.0": {"P": 0.05772}, "4569.0": {"P": 0.05843}, "5257.0": {"P": 0.05898}, "6048.0": {"P": 0.05935}, "6959.0": {"P": 0.05954}, "8007.0": {"P": 0.05954}, "9213.0": {"P": 0.05935}, "10600.0": {"P": 0.05895}, "12200.0": {"P": 0.05836}, "14030.0": {"P": 0.05756}, "16150.0": {"P": 0.05657}, "18580.0": {"P": 0.05538}, "21370.0": {"P": 0.05401}, "24590.0": {"P": 0.05247}, "28300.0": {"P": 0.05077}, "32560.0": {"P": 0.04893}, "37460.0": {"P": 0.04698}, "43100.0": {"P": 0.04493}, "49590.0": {"P": 0.0428}, "57060.0": {"P": 0.04062}, "65650.0": {"P": 0.03842}, "75540.0": {"P": 0.0362}, "86910.0": {"P": 0.03399}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.168, "q": 0.1524, "mu": 1.545, "epsilonL": 3.817e-05, "Eth": 103.5}, "E_min": 103.5, "E_max": 100000}}]}