{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Th", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Th(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.168, "q": 0.1524, "mu": 1.545, "epsilonL": 3.817e-05, "Eth": 103.5}, "E_min": 103.5, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
103.5	4.19e-27	
119.1	0.0001347	
137.0	0.000498	
157.7	0.001169	
181.4	0.00226	
208.7	0.003886	
240.2	0.006139	
276.3	0.00905	
318.0	0.01256	
365.8	0.01651	
420.9	0.02069	
484.3	0.02487	
557.2	0.02888	
641.2	0.0326	
737.7	0.03598	
848.8	0.03902	
976.6	0.04175	
1124.0	0.04419	
1293.0	0.0464	
1488.0	0.04839	
1712.0	0.05019	
1969.0	0.05183	
2266.0	0.05331	
2607.0	0.05463	
3000.0	0.05581	
3451.0	0.05684	
3971.0	0.05772	
4569.0	0.05843	
5257.0	0.05898	
6048.0	0.05935	
6959.0	0.05954	
8007.0	0.05954	
9213.0	0.05935	
10600.0	0.05895	
12200.0	0.05836	
14030.0	0.05756	
16150.0	0.05657	
18580.0	0.05538	
21370.0	0.05401	
24590.0	0.05247	
28300.0	0.05077	
32560.0	0.04893	
37460.0	0.04698	
43100.0	0.04493	
49590.0	0.0428	
57060.0	0.04062	
65650.0	0.03842	
75540.0	0.0362	
86910.0	0.03399	
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