pwiDB

Plasma-Surface Interaction Data Set 517

Sputtering of Ar⁺ on Bi(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Bi(pc) at 300 K

angle = 0.0 deg	E /eV	P
	9.401	0.0
	11.36	0.001051
	13.73	0.004286
	16.59	0.011
	20.04	0.02304
	24.22	0.04252
	29.26	0.07127
	35.35	0.1102
	42.72	0.1589
	51.62	0.2159
	62.37	0.279
	75.36	0.3467
	91.06	0.418
	110.0	0.4925
	133.0	0.5706
	160.7	0.653
	194.1	0.7403
	234.6	0.8333
	283.4	0.9328
	342.5	1.039
	413.8	1.154
	500.0	1.276
	604.1	1.407
	730.0	1.546
	882.1	1.694
	1066.0	1.851
	1288.0	2.017
	1556.0	2.191
	1880.0	2.373
	2272.0	2.562
	2745.0	2.758
	3317.0	2.959
	4008.0	3.164
	4843.0	3.372
	5852.0	3.583
	7071.0	3.793
	8544.0	4.001
	10320.0	4.206
	12470.0	4.405
	15070.0	4.596
	18210.0	4.778
	22010.0	4.946
	26590.0	5.099
	32130.0	5.235
	38820.0	5.35
	46910.0	5.442
	56680.0	5.508
	68490.0	5.546
	82760.0	5.553

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0289
q = 14.2
mu = 1.564
epsilonL = 3.593e-06
Eth = 9.401

Fit range

E = 9.401 – 100000