{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Bi", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Bi(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0289, "q": 14.2, "mu": 1.564, "epsilonL": 3.593e-06, "Eth": 9.401}, "E_min": 9.401, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
9.401	0.0	
11.36	0.001051	
13.73	0.004286	
16.59	0.011	
20.04	0.02304	
24.22	0.04252	
29.26	0.07127	
35.35	0.1102	
42.72	0.1589	
51.62	0.2159	
62.37	0.279	
75.36	0.3467	
91.06	0.418	
110.0	0.4925	
133.0	0.5706	
160.7	0.653	
194.1	0.7403	
234.6	0.8333	
283.4	0.9328	
342.5	1.039	
413.8	1.154	
500.0	1.276	
604.1	1.407	
730.0	1.546	
882.1	1.694	
1066.0	1.851	
1288.0	2.017	
1556.0	2.191	
1880.0	2.373	
2272.0	2.562	
2745.0	2.758	
3317.0	2.959	
4008.0	3.164	
4843.0	3.372	
5852.0	3.583	
7071.0	3.793	
8544.0	4.001	
10320.0	4.206	
12470.0	4.405	
15070.0	4.596	
18210.0	4.778	
22010.0	4.946	
26590.0	5.099	
32130.0	5.235	
38820.0	5.35	
46910.0	5.442	
56680.0	5.508	
68490.0	5.546	
82760.0	5.553	
-----