{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Bi", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"9.401": {"P": 0}, "11.36": {"P": 0.001051}, "13.73": {"P": 0.004286}, "16.59": {"P": 0.011}, "20.04": {"P": 0.02304}, "24.22": {"P": 0.04252}, "29.26": {"P": 0.07127}, "35.35": {"P": 0.1102}, "42.72": {"P": 0.1589}, "51.62": {"P": 0.2159}, "62.37": {"P": 0.279}, "75.36": {"P": 0.3467}, "91.06": {"P": 0.418}, "110.0": {"P": 0.4925}, "133.0": {"P": 0.5706}, "160.7": {"P": 0.653}, "194.1": {"P": 0.7403}, "234.6": {"P": 0.8333}, "283.4": {"P": 0.9328}, "342.5": {"P": 1.039}, "413.8": {"P": 1.154}, "500.0": {"P": 1.276}, "604.1": {"P": 1.407}, "730.0": {"P": 1.546}, "882.1": {"P": 1.694}, "1066.0": {"P": 1.851}, "1288.0": {"P": 2.017}, "1556.0": {"P": 2.191}, "1880.0": {"P": 2.373}, "2272.0": {"P": 2.562}, "2745.0": {"P": 2.758}, "3317.0": {"P": 2.959}, "4008.0": {"P": 3.164}, "4843.0": {"P": 3.372}, "5852.0": {"P": 3.583}, "7071.0": {"P": 3.793}, "8544.0": {"P": 4.001}, "10320.0": {"P": 4.206}, "12470.0": {"P": 4.405}, "15070.0": {"P": 4.596}, "18210.0": {"P": 4.778}, "22010.0": {"P": 4.946}, "26590.0": {"P": 5.099}, "32130.0": {"P": 5.235}, "38820.0": {"P": 5.35}, "46910.0": {"P": 5.442}, "56680.0": {"P": 5.508}, "68490.0": {"P": 5.546}, "82760.0": {"P": 5.553}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0289, "q": 14.2, "mu": 1.564, "epsilonL": 3.593e-06, "Eth": 9.401}, "E_min": 9.401, "E_max": 100000}}]}