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Plasma-Surface Interaction Data Set 505

Sputtering of Ar+ on Au(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar+ on Au(pc) at 300 K

angle = 0.0 deg E /eV P
15.620.0
18.680.0001155
22.340.000906
26.710.003557
31.940.01042
38.20.02552
45.680.05431
54.630.1015
65.330.1672
78.120.2454
93.430.3279
111.70.4089
133.60.487
159.80.5632
191.10.6393
228.50.7174
273.20.7988
326.80.8847
390.80.9758
467.31.073
558.81.176
668.31.286
799.21.403
955.71.526
1143.01.656
1367.01.792
1634.01.935
1954.02.083
2337.02.236
2795.02.394
3343.02.556
3997.02.721
4780.02.888
5716.03.056
6836.03.224
8175.03.391
9776.03.554
11690.03.714
13980.03.867
16720.04.014
19990.04.151
23910.04.277
28590.04.39
34190.04.488
40890.04.57
48900.04.633
58470.04.675
69930.04.696
83620.04.692

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 15.62 – 100000