{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0906, "q": 12.01, "mu": 2.397, "epsilonL": 3.783e-06, "Eth": 15.62}, "E_min": 15.62, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
15.62	0.0	
18.68	0.0001155	
22.34	0.000906	
26.71	0.003557	
31.94	0.01042	
38.2	0.02552	
45.68	0.05431	
54.63	0.1015	
65.33	0.1672	
78.12	0.2454	
93.43	0.3279	
111.7	0.4089	
133.6	0.487	
159.8	0.5632	
191.1	0.6393	
228.5	0.7174	
273.2	0.7988	
326.8	0.8847	
390.8	0.9758	
467.3	1.073	
558.8	1.176	
668.3	1.286	
799.2	1.403	
955.7	1.526	
1143.0	1.656	
1367.0	1.792	
1634.0	1.935	
1954.0	2.083	
2337.0	2.236	
2795.0	2.394	
3343.0	2.556	
3997.0	2.721	
4780.0	2.888	
5716.0	3.056	
6836.0	3.224	
8175.0	3.391	
9776.0	3.554	
11690.0	3.714	
13980.0	3.867	
16720.0	4.014	
19990.0	4.151	
23910.0	4.277	
28590.0	4.39	
34190.0	4.488	
40890.0	4.57	
48900.0	4.633	
58470.0	4.675	
69930.0	4.696	
83620.0	4.692	
-----