{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"15.62": {"P": 0}, "18.68": {"P": 0.0001155}, "22.34": {"P": 0.000906}, "26.71": {"P": 0.003557}, "31.94": {"P": 0.01042}, "38.2": {"P": 0.02552}, "45.68": {"P": 0.05431}, "54.63": {"P": 0.1015}, "65.33": {"P": 0.1672}, "78.12": {"P": 0.2454}, "93.43": {"P": 0.3279}, "111.7": {"P": 0.4089}, "133.6": {"P": 0.487}, "159.8": {"P": 0.5632}, "191.1": {"P": 0.6393}, "228.5": {"P": 0.7174}, "273.2": {"P": 0.7988}, "326.8": {"P": 0.8847}, "390.8": {"P": 0.9758}, "467.3": {"P": 1.073}, "558.8": {"P": 1.176}, "668.3": {"P": 1.286}, "799.2": {"P": 1.403}, "955.7": {"P": 1.526}, "1143.0": {"P": 1.656}, "1367.0": {"P": 1.792}, "1634.0": {"P": 1.935}, "1954.0": {"P": 2.083}, "2337.0": {"P": 2.236}, "2795.0": {"P": 2.394}, "3343.0": {"P": 2.556}, "3997.0": {"P": 2.721}, "4780.0": {"P": 2.888}, "5716.0": {"P": 3.056}, "6836.0": {"P": 3.224}, "8175.0": {"P": 3.391}, "9776.0": {"P": 3.554}, "11690.0": {"P": 3.714}, "13980.0": {"P": 3.867}, "16720.0": {"P": 4.014}, "19990.0": {"P": 4.151}, "23910.0": {"P": 4.277}, "28590.0": {"P": 4.39}, "34190.0": {"P": 4.488}, "40890.0": {"P": 4.57}, "48900.0": {"P": 4.633}, "58470.0": {"P": 4.675}, "69930.0": {"P": 4.696}, "83620.0": {"P": 4.692}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0906, "q": 12.01, "mu": 2.397, "epsilonL": 3.783e-06, "Eth": 15.62}, "E_min": 15.62, "E_max": 100000}}]}