pwiDB

Plasma-Surface Interaction Data Set 504

Sputtering of Ne⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	19.08	1.159e-32
	22.72	0.0002202
	27.06	0.001144
	32.23	0.003437
	38.38	0.00818
	45.71	0.01694
	54.44	0.03162
	64.84	0.05401
	77.22	0.08493
	91.97	0.1237
	109.5	0.1682
	130.5	0.2158
	155.4	0.2645
	185.1	0.3133
	220.4	0.3619
	262.5	0.4108
	312.6	0.4604
	372.3	0.5114
	443.4	0.5642
	528.1	0.6192
	629.0	0.6767
	749.1	0.7369
	892.2	0.7999
	1063.0	0.8658
	1266.0	0.9344
	1507.0	1.006
	1795.0	1.079
	2138.0	1.156
	2546.0	1.234
	3033.0	1.313
	3612.0	1.394
	4302.0	1.475
	5123.0	1.557
	6102.0	1.638
	7267.0	1.719
	8655.0	1.798
	10310.0	1.874
	12280.0	1.948
	14620.0	2.017
	17410.0	2.082
	20740.0	2.142
	24700.0	2.195
	29420.0	2.241
	35040.0	2.279
	41730.0	2.308
	49700.0	2.326
	59190.0	2.335
	70500.0	2.332
	83960.0	2.317

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0758
q = 5.971
mu = 1.889
epsilonL = 4.576e-06
Eth = 19.08

Fit range

E = 19.08 – 100000