{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0758, "q": 5.971, "mu": 1.889, "epsilonL": 4.576e-06, "Eth": 19.08}, "E_min": 19.08, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
19.08	1.159e-32	
22.72	0.0002202	
27.06	0.001144	
32.23	0.003437	
38.38	0.00818	
45.71	0.01694	
54.44	0.03162	
64.84	0.05401	
77.22	0.08493	
91.97	0.1237	
109.5	0.1682	
130.5	0.2158	
155.4	0.2645	
185.1	0.3133	
220.4	0.3619	
262.5	0.4108	
312.6	0.4604	
372.3	0.5114	
443.4	0.5642	
528.1	0.6192	
629.0	0.6767	
749.1	0.7369	
892.2	0.7999	
1063.0	0.8658	
1266.0	0.9344	
1507.0	1.006	
1795.0	1.079	
2138.0	1.156	
2546.0	1.234	
3033.0	1.313	
3612.0	1.394	
4302.0	1.475	
5123.0	1.557	
6102.0	1.638	
7267.0	1.719	
8655.0	1.798	
10310.0	1.874	
12280.0	1.948	
14620.0	2.017	
17410.0	2.082	
20740.0	2.142	
24700.0	2.195	
29420.0	2.241	
35040.0	2.279	
41730.0	2.308	
49700.0	2.326	
59190.0	2.335	
70500.0	2.332	
83960.0	2.317	
-----