{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"19.08": {"P": 1.159e-32}, "22.72": {"P": 0.0002202}, "27.06": {"P": 0.001144}, "32.23": {"P": 0.003437}, "38.38": {"P": 0.00818}, "45.71": {"P": 0.01694}, "54.44": {"P": 0.03162}, "64.84": {"P": 0.05401}, "77.22": {"P": 0.08493}, "91.97": {"P": 0.1237}, "109.5": {"P": 0.1682}, "130.5": {"P": 0.2158}, "155.4": {"P": 0.2645}, "185.1": {"P": 0.3133}, "220.4": {"P": 0.3619}, "262.5": {"P": 0.4108}, "312.6": {"P": 0.4604}, "372.3": {"P": 0.5114}, "443.4": {"P": 0.5642}, "528.1": {"P": 0.6192}, "629.0": {"P": 0.6767}, "749.1": {"P": 0.7369}, "892.2": {"P": 0.7999}, "1063.0": {"P": 0.8658}, "1266.0": {"P": 0.9344}, "1507.0": {"P": 1.006}, "1795.0": {"P": 1.079}, "2138.0": {"P": 1.156}, "2546.0": {"P": 1.234}, "3033.0": {"P": 1.313}, "3612.0": {"P": 1.394}, "4302.0": {"P": 1.475}, "5123.0": {"P": 1.557}, "6102.0": {"P": 1.638}, "7267.0": {"P": 1.719}, "8655.0": {"P": 1.798}, "10310.0": {"P": 1.874}, "12280.0": {"P": 1.948}, "14620.0": {"P": 2.017}, "17410.0": {"P": 2.082}, "20740.0": {"P": 2.142}, "24700.0": {"P": 2.195}, "29420.0": {"P": 2.241}, "35040.0": {"P": 2.279}, "41730.0": {"P": 2.308}, "49700.0": {"P": 2.326}, "59190.0": {"P": 2.335}, "70500.0": {"P": 2.332}, "83960.0": {"P": 2.317}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0758, "q": 5.971, "mu": 1.889, "epsilonL": 4.576e-06, "Eth": 19.08}, "E_min": 19.08, "E_max": 100000}}]}