pwiDB

Plasma-Surface Interaction Data Set 503

Sputtering of O⁺ on Au(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on Au(pc) at 300 K

angle = 0.0 deg	E /eV	P
	21.33	0.0
	25.35	0.0004132
	30.12	0.002151
	35.79	0.006409
	42.53	0.01498
	50.54	0.03005
	60.05	0.05361
	71.36	0.08632
	84.8	0.1268
	100.8	0.1723
	119.7	0.2194
	142.3	0.2662
	169.1	0.3116
	200.9	0.3557
	238.7	0.3991
	283.7	0.4423
	337.1	0.4858
	400.5	0.5302
	475.9	0.5757
	565.5	0.6224
	672.0	0.6706
	798.6	0.7201
	948.9	0.771
	1128.0	0.823
	1340.0	0.8761
	1592.0	0.9299
	1892.0	0.9841
	2248.0	1.039
	2671.0	1.093
	3174.0	1.147
	3772.0	1.199
	4482.0	1.251
	5326.0	1.3
	6329.0	1.347
	7520.0	1.392
	8936.0	1.432
	10620.0	1.469
	12620.0	1.501
	14990.0	1.529
	17820.0	1.55
	21170.0	1.565
	25160.0	1.573
	29890.0	1.574
	35520.0	1.568
	42210.0	1.553
	50160.0	1.531
	59600.0	1.5
	70820.0	1.462
	84160.0	1.417

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0634
q = 4.027
mu = 1.903
epsilonL = 1.006e-05
Eth = 21.33

Fit range

E = 21.33 – 100000