{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"21.33": {"P": 0}, "25.35": {"P": 0.0004132}, "30.12": {"P": 0.002151}, "35.79": {"P": 0.006409}, "42.53": {"P": 0.01498}, "50.54": {"P": 0.03005}, "60.05": {"P": 0.05361}, "71.36": {"P": 0.08632}, "84.8": {"P": 0.1268}, "100.8": {"P": 0.1723}, "119.7": {"P": 0.2194}, "142.3": {"P": 0.2662}, "169.1": {"P": 0.3116}, "200.9": {"P": 0.3557}, "238.7": {"P": 0.3991}, "283.7": {"P": 0.4423}, "337.1": {"P": 0.4858}, "400.5": {"P": 0.5302}, "475.9": {"P": 0.5757}, "565.5": {"P": 0.6224}, "672.0": {"P": 0.6706}, "798.6": {"P": 0.7201}, "948.9": {"P": 0.771}, "1128.0": {"P": 0.823}, "1340.0": {"P": 0.8761}, "1592.0": {"P": 0.9299}, "1892.0": {"P": 0.9841}, "2248.0": {"P": 1.039}, "2671.0": {"P": 1.093}, "3174.0": {"P": 1.147}, "3772.0": {"P": 1.199}, "4482.0": {"P": 1.251}, "5326.0": {"P": 1.3}, "6329.0": {"P": 1.347}, "7520.0": {"P": 1.392}, "8936.0": {"P": 1.432}, "10620.0": {"P": 1.469}, "12620.0": {"P": 1.501}, "14990.0": {"P": 1.529}, "17820.0": {"P": 1.55}, "21170.0": {"P": 1.565}, "25160.0": {"P": 1.573}, "29890.0": {"P": 1.574}, "35520.0": {"P": 1.568}, "42210.0": {"P": 1.553}, "50160.0": {"P": 1.531}, "59600.0": {"P": 1.5}, "70820.0": {"P": 1.462}, "84160.0": {"P": 1.417}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0634, "q": 4.027, "mu": 1.903, "epsilonL": 1.006e-05, "Eth": 21.33}, "E_min": 21.33, "E_max": 100000}}]}