{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Au", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of O+ on Au(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0634, "q": 4.027, "mu": 1.903, "epsilonL": 1.006e-05, "Eth": 21.33}, "E_min": 21.33, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
21.33	0.0	
25.35	0.0004132	
30.12	0.002151	
35.79	0.006409	
42.53	0.01498	
50.54	0.03005	
60.05	0.05361	
71.36	0.08632	
84.8	0.1268	
100.8	0.1723	
119.7	0.2194	
142.3	0.2662	
169.1	0.3116	
200.9	0.3557	
238.7	0.3991	
283.7	0.4423	
337.1	0.4858	
400.5	0.5302	
475.9	0.5757	
565.5	0.6224	
672.0	0.6706	
798.6	0.7201	
948.9	0.771	
1128.0	0.823	
1340.0	0.8761	
1592.0	0.9299	
1892.0	0.9841	
2248.0	1.039	
2671.0	1.093	
3174.0	1.147	
3772.0	1.199	
4482.0	1.251	
5326.0	1.3	
6329.0	1.347	
7520.0	1.392	
8936.0	1.432	
10620.0	1.469	
12620.0	1.501	
14990.0	1.529	
17820.0	1.55	
21170.0	1.565	
25160.0	1.573	
29890.0	1.574	
35520.0	1.568	
42210.0	1.553	
50160.0	1.531	
59600.0	1.5	
70820.0	1.462	
84160.0	1.417	
-----