pwiDB

Plasma-Surface Interaction Data Set 493

Sputtering of Ar⁺ on Pt(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Pt(pc) at 300 K

angle = 0.0 deg	E /eV	P
	23.38	6.572e-39
	27.73	0.0001377
	32.89	0.0009795
	39.01	0.003602
	46.27	0.01006
	54.88	0.02391
	65.09	0.05057
	77.2	0.09653
	91.56	0.1668
	108.6	0.2611
	128.8	0.3726
	152.8	0.4915
	181.2	0.6098
	214.9	0.7243
	254.9	0.835
	302.3	0.9439
	358.5	1.053
	425.2	1.165
	504.4	1.28
	598.2	1.4
	709.5	1.526
	841.5	1.659
	998.1	1.797
	1184.0	1.943
	1404.0	2.094
	1665.0	2.252
	1975.0	2.415
	2343.0	2.584
	2778.0	2.758
	3295.0	2.935
	3908.0	3.116
	4636.0	3.299
	5498.0	3.483
	6521.0	3.667
	7734.0	3.85
	9173.0	4.03
	10880.0	4.206
	12900.0	4.377
	15310.0	4.541
	18150.0	4.695
	21530.0	4.839
	25540.0	4.971
	30290.0	5.088
	35920.0	5.189
	42610.0	5.272
	50530.0	5.335
	59940.0	5.376
	71090.0	5.393
	84310.0	5.386

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.138
q = 13.79
mu = 2.295
epsilonL = 3.837e-06
Eth = 23.38

Fit range

E = 23.38 – 100000