{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"23.38": {"P": 6.572e-39}, "27.73": {"P": 0.0001377}, "32.89": {"P": 0.0009795}, "39.01": {"P": 0.003602}, "46.27": {"P": 0.01006}, "54.88": {"P": 0.02391}, "65.09": {"P": 0.05057}, "77.2": {"P": 0.09653}, "91.56": {"P": 0.1668}, "108.6": {"P": 0.2611}, "128.8": {"P": 0.3726}, "152.8": {"P": 0.4915}, "181.2": {"P": 0.6098}, "214.9": {"P": 0.7243}, "254.9": {"P": 0.835}, "302.3": {"P": 0.9439}, "358.5": {"P": 1.053}, "425.2": {"P": 1.165}, "504.4": {"P": 1.28}, "598.2": {"P": 1.4}, "709.5": {"P": 1.526}, "841.5": {"P": 1.659}, "998.1": {"P": 1.797}, "1184.0": {"P": 1.943}, "1404.0": {"P": 2.094}, "1665.0": {"P": 2.252}, "1975.0": {"P": 2.415}, "2343.0": {"P": 2.584}, "2778.0": {"P": 2.758}, "3295.0": {"P": 2.935}, "3908.0": {"P": 3.116}, "4636.0": {"P": 3.299}, "5498.0": {"P": 3.483}, "6521.0": {"P": 3.667}, "7734.0": {"P": 3.85}, "9173.0": {"P": 4.03}, "10880.0": {"P": 4.206}, "12900.0": {"P": 4.377}, "15310.0": {"P": 4.541}, "18150.0": {"P": 4.695}, "21530.0": {"P": 4.839}, "25540.0": {"P": 4.971}, "30290.0": {"P": 5.088}, "35920.0": {"P": 5.189}, "42610.0": {"P": 5.272}, "50530.0": {"P": 5.335}, "59940.0": {"P": 5.376}, "71090.0": {"P": 5.393}, "84310.0": {"P": 5.386}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.138, "q": 13.79, "mu": 2.295, "epsilonL": 3.837e-06, "Eth": 23.38}, "E_min": 23.38, "E_max": 100000}}]}