{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.138, "q": 13.79, "mu": 2.295, "epsilonL": 3.837e-06, "Eth": 23.38}, "E_min": 23.38, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
23.38	6.572e-39	
27.73	0.0001377	
32.89	0.0009795	
39.01	0.003602	
46.27	0.01006	
54.88	0.02391	
65.09	0.05057	
77.2	0.09653	
91.56	0.1668	
108.6	0.2611	
128.8	0.3726	
152.8	0.4915	
181.2	0.6098	
214.9	0.7243	
254.9	0.835	
302.3	0.9439	
358.5	1.053	
425.2	1.165	
504.4	1.28	
598.2	1.4	
709.5	1.526	
841.5	1.659	
998.1	1.797	
1184.0	1.943	
1404.0	2.094	
1665.0	2.252	
1975.0	2.415	
2343.0	2.584	
2778.0	2.758	
3295.0	2.935	
3908.0	3.116	
4636.0	3.299	
5498.0	3.483	
6521.0	3.667	
7734.0	3.85	
9173.0	4.03	
10880.0	4.206	
12900.0	4.377	
15310.0	4.541	
18150.0	4.695	
21530.0	4.839	
25540.0	4.971	
30290.0	5.088	
35920.0	5.189	
42610.0	5.272	
50530.0	5.335	
59940.0	5.376	
71090.0	5.393	
84310.0	5.386	
-----