pwiDB

Plasma-Surface Interaction Data Set 492

Sputtering of Ne⁺ on Pt(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Pt(pc) at 300 K

angle = 0.0 deg	E /eV	P
	28.09	4.241e-36
	33.19	0.0002302
	39.21	0.001415
	46.34	0.004699
	54.75	0.012
	64.7	0.02613
	76.45	0.05038
	90.33	0.08719
	106.7	0.1365
	126.1	0.1948
	149.0	0.2571
	176.1	0.3191
	208.1	0.3786
	245.9	0.4353
	290.5	0.4898
	343.3	0.5432
	405.7	0.5964
	479.3	0.6501
	566.4	0.7049
	669.3	0.7612
	790.8	0.819
	934.5	0.8785
	1104.0	0.9396
	1305.0	1.002
	1542.0	1.066
	1822.0	1.131
	2153.0	1.197
	2544.0	1.263
	3006.0	1.33
	3551.0	1.396
	4196.0	1.461
	4959.0	1.525
	5859.0	1.588
	6923.0	1.648
	8181.0	1.705
	9667.0	1.759
	11420.0	1.808
	13500.0	1.853
	15950.0	1.893
	18850.0	1.926
	22270.0	1.953
	26310.0	1.972
	31090.0	1.984
	36740.0	1.987
	43410.0	1.981
	51300.0	1.966
	60610.0	1.941
	71620.0	1.907
	84630.0	1.864

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0949
q = 5.08
mu = 2.123
epsilonL = 7.9e-06
Eth = 28.09

Fit range

E = 28.09 – 100000