{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0949, "q": 5.08, "mu": 2.123, "epsilonL": 7.9e-06, "Eth": 28.09}, "E_min": 28.09, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
28.09	4.241e-36	
33.19	0.0002302	
39.21	0.001415	
46.34	0.004699	
54.75	0.012	
64.7	0.02613	
76.45	0.05038	
90.33	0.08719	
106.7	0.1365	
126.1	0.1948	
149.0	0.2571	
176.1	0.3191	
208.1	0.3786	
245.9	0.4353	
290.5	0.4898	
343.3	0.5432	
405.7	0.5964	
479.3	0.6501	
566.4	0.7049	
669.3	0.7612	
790.8	0.819	
934.5	0.8785	
1104.0	0.9396	
1305.0	1.002	
1542.0	1.066	
1822.0	1.131	
2153.0	1.197	
2544.0	1.263	
3006.0	1.33	
3551.0	1.396	
4196.0	1.461	
4959.0	1.525	
5859.0	1.588	
6923.0	1.648	
8181.0	1.705	
9667.0	1.759	
11420.0	1.808	
13500.0	1.853	
15950.0	1.893	
18850.0	1.926	
22270.0	1.953	
26310.0	1.972	
31090.0	1.984	
36740.0	1.987	
43410.0	1.981	
51300.0	1.966	
60610.0	1.941	
71620.0	1.907	
84630.0	1.864	
-----