{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"28.09": {"P": 4.241e-36}, "33.19": {"P": 0.0002302}, "39.21": {"P": 0.001415}, "46.34": {"P": 0.004699}, "54.75": {"P": 0.012}, "64.7": {"P": 0.02613}, "76.45": {"P": 0.05038}, "90.33": {"P": 0.08719}, "106.7": {"P": 0.1365}, "126.1": {"P": 0.1948}, "149.0": {"P": 0.2571}, "176.1": {"P": 0.3191}, "208.1": {"P": 0.3786}, "245.9": {"P": 0.4353}, "290.5": {"P": 0.4898}, "343.3": {"P": 0.5432}, "405.7": {"P": 0.5964}, "479.3": {"P": 0.6501}, "566.4": {"P": 0.7049}, "669.3": {"P": 0.7612}, "790.8": {"P": 0.819}, "934.5": {"P": 0.8785}, "1104.0": {"P": 0.9396}, "1305.0": {"P": 1.002}, "1542.0": {"P": 1.066}, "1822.0": {"P": 1.131}, "2153.0": {"P": 1.197}, "2544.0": {"P": 1.263}, "3006.0": {"P": 1.33}, "3551.0": {"P": 1.396}, "4196.0": {"P": 1.461}, "4959.0": {"P": 1.525}, "5859.0": {"P": 1.588}, "6923.0": {"P": 1.648}, "8181.0": {"P": 1.705}, "9667.0": {"P": 1.759}, "11420.0": {"P": 1.808}, "13500.0": {"P": 1.853}, "15950.0": {"P": 1.893}, "18850.0": {"P": 1.926}, "22270.0": {"P": 1.953}, "26310.0": {"P": 1.972}, "31090.0": {"P": 1.984}, "36740.0": {"P": 1.987}, "43410.0": {"P": 1.981}, "51300.0": {"P": 1.966}, "60610.0": {"P": 1.941}, "71620.0": {"P": 1.907}, "84630.0": {"P": 1.864}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0949, "q": 5.08, "mu": 2.123, "epsilonL": 7.9e-06, "Eth": 28.09}, "E_min": 28.09, "E_max": 100000}}]}