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Plasma-Surface Interaction Data Set 490

Sputtering of 4He+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
85.570.0
98.830.0001381
114.20.0006331
131.90.001692
152.30.003567
175.90.006471
203.20.01047
234.70.0154
271.10.02085
313.20.02637
361.70.03159
417.80.03629
482.60.04044
557.40.04407
643.90.04728
743.70.05013
859.00.0527
992.20.05506
1146.00.05722
1324.00.05922
1529.00.06107
1766.00.06277
2040.00.06433
2356.00.06574
2722.00.06698
3144.00.06806
3631.00.06895
4194.00.06965
4845.00.07014
5596.00.07041
6464.00.07045
7466.00.07026
8624.00.06981
9961.00.06912
11510.00.06818
13290.00.06699
15350.00.06556
17730.00.0639
20480.00.06203
23660.00.05996
27320.00.05772
31560.00.05534
36460.00.05283
42110.00.05024
48640.00.04759
56180.00.0449
64890.00.04221
74950.00.03953
86580.00.0369

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 85.57 – 100000