{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (4He)+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1214, "q": 0.1802, "mu": 1.819, "epsilonL": 4.588e-05, "Eth": 85.57}, "E_min": 85.57, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
85.57	0.0	
98.83	0.0001381	
114.2	0.0006331	
131.9	0.001692	
152.3	0.003567	
175.9	0.006471	
203.2	0.01047	
234.7	0.0154	
271.1	0.02085	
313.2	0.02637	
361.7	0.03159	
417.8	0.03629	
482.6	0.04044	
557.4	0.04407	
643.9	0.04728	
743.7	0.05013	
859.0	0.0527	
992.2	0.05506	
1146.0	0.05722	
1324.0	0.05922	
1529.0	0.06107	
1766.0	0.06277	
2040.0	0.06433	
2356.0	0.06574	
2722.0	0.06698	
3144.0	0.06806	
3631.0	0.06895	
4194.0	0.06965	
4845.0	0.07014	
5596.0	0.07041	
6464.0	0.07045	
7466.0	0.07026	
8624.0	0.06981	
9961.0	0.06912	
11510.0	0.06818	
13290.0	0.06699	
15350.0	0.06556	
17730.0	0.0639	
20480.0	0.06203	
23660.0	0.05996	
27320.0	0.05772	
31560.0	0.05534	
36460.0	0.05283	
42110.0	0.05024	
48640.0	0.04759	
56180.0	0.0449	
64890.0	0.04221	
74950.0	0.03953	
86580.0	0.0369	
-----