{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"85.57": {"P": 0}, "98.83": {"P": 0.0001381}, "114.2": {"P": 0.0006331}, "131.9": {"P": 0.001692}, "152.3": {"P": 0.003567}, "175.9": {"P": 0.006471}, "203.2": {"P": 0.01047}, "234.7": {"P": 0.0154}, "271.1": {"P": 0.02085}, "313.2": {"P": 0.02637}, "361.7": {"P": 0.03159}, "417.8": {"P": 0.03629}, "482.6": {"P": 0.04044}, "557.4": {"P": 0.04407}, "643.9": {"P": 0.04728}, "743.7": {"P": 0.05013}, "859.0": {"P": 0.0527}, "992.2": {"P": 0.05506}, "1146.0": {"P": 0.05722}, "1324.0": {"P": 0.05922}, "1529.0": {"P": 0.06107}, "1766.0": {"P": 0.06277}, "2040.0": {"P": 0.06433}, "2356.0": {"P": 0.06574}, "2722.0": {"P": 0.06698}, "3144.0": {"P": 0.06806}, "3631.0": {"P": 0.06895}, "4194.0": {"P": 0.06965}, "4845.0": {"P": 0.07014}, "5596.0": {"P": 0.07041}, "6464.0": {"P": 0.07045}, "7466.0": {"P": 0.07026}, "8624.0": {"P": 0.06981}, "9961.0": {"P": 0.06912}, "11510.0": {"P": 0.06818}, "13290.0": {"P": 0.06699}, "15350.0": {"P": 0.06556}, "17730.0": {"P": 0.0639}, "20480.0": {"P": 0.06203}, "23660.0": {"P": 0.05996}, "27320.0": {"P": 0.05772}, "31560.0": {"P": 0.05534}, "36460.0": {"P": 0.05283}, "42110.0": {"P": 0.05024}, "48640.0": {"P": 0.04759}, "56180.0": {"P": 0.0449}, "64890.0": {"P": 0.04221}, "74950.0": {"P": 0.03953}, "86580.0": {"P": 0.0369}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1214, "q": 0.1802, "mu": 1.819, "epsilonL": 4.588e-05, "Eth": 85.57}, "E_min": 85.57, "E_max": 100000}}]}