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Plasma-Surface Interaction Data Set 488

Sputtering of T+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
112.60.0
129.40.0001451
148.60.0004873
170.70.001072
196.00.001964
225.20.00322
258.60.004869
297.10.006889
341.20.009203
391.90.01169
450.10.0142
517.00.01661
593.90.01882
682.10.02079
783.50.0225
899.90.02397
1034.00.02521
1187.00.02624
1364.00.0271
1566.00.02781
1799.00.02837
2066.00.0288
2374.00.02911
2726.00.02931
3131.00.02939
3597.00.02937
4131.00.02924
4745.00.029
5450.00.02866
6260.00.02822
7190.00.02768
8259.00.02705
9486.00.02633
10900.00.02553
12520.00.02466
14380.00.02373
16510.00.02274
18960.00.02172
21780.00.02066
25020.00.01959
28740.00.0185
33010.00.01742
37910.00.01634
43550.00.01528
50020.00.01425
57450.00.01325
65990.00.01229
75800.00.01136
87060.00.01048

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 112.6 – 100000