{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of T+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2492, "q": 0.0756, "mu": 1.431, "epsilonL": 9.361e-05, "Eth": 112.6}, "E_min": 112.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
112.6	0.0	
129.4	0.0001451	
148.6	0.0004873	
170.7	0.001072	
196.0	0.001964	
225.2	0.00322	
258.6	0.004869	
297.1	0.006889	
341.2	0.009203	
391.9	0.01169	
450.1	0.0142	
517.0	0.01661	
593.9	0.01882	
682.1	0.02079	
783.5	0.0225	
899.9	0.02397	
1034.0	0.02521	
1187.0	0.02624	
1364.0	0.0271	
1566.0	0.02781	
1799.0	0.02837	
2066.0	0.0288	
2374.0	0.02911	
2726.0	0.02931	
3131.0	0.02939	
3597.0	0.02937	
4131.0	0.02924	
4745.0	0.029	
5450.0	0.02866	
6260.0	0.02822	
7190.0	0.02768	
8259.0	0.02705	
9486.0	0.02633	
10900.0	0.02553	
12520.0	0.02466	
14380.0	0.02373	
16510.0	0.02274	
18960.0	0.02172	
21780.0	0.02066	
25020.0	0.01959	
28740.0	0.0185	
33010.0	0.01742	
37910.0	0.01634	
43550.0	0.01528	
50020.0	0.01425	
57450.0	0.01325	
65990.0	0.01229	
75800.0	0.01136	
87060.0	0.01048	
-----