{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"112.6": {"P": 0}, "129.4": {"P": 0.0001451}, "148.6": {"P": 0.0004873}, "170.7": {"P": 0.001072}, "196.0": {"P": 0.001964}, "225.2": {"P": 0.00322}, "258.6": {"P": 0.004869}, "297.1": {"P": 0.006889}, "341.2": {"P": 0.009203}, "391.9": {"P": 0.01169}, "450.1": {"P": 0.0142}, "517.0": {"P": 0.01661}, "593.9": {"P": 0.01882}, "682.1": {"P": 0.02079}, "783.5": {"P": 0.0225}, "899.9": {"P": 0.02397}, "1034.0": {"P": 0.02521}, "1187.0": {"P": 0.02624}, "1364.0": {"P": 0.0271}, "1566.0": {"P": 0.02781}, "1799.0": {"P": 0.02837}, "2066.0": {"P": 0.0288}, "2374.0": {"P": 0.02911}, "2726.0": {"P": 0.02931}, "3131.0": {"P": 0.02939}, "3597.0": {"P": 0.02937}, "4131.0": {"P": 0.02924}, "4745.0": {"P": 0.029}, "5450.0": {"P": 0.02866}, "6260.0": {"P": 0.02822}, "7190.0": {"P": 0.02768}, "8259.0": {"P": 0.02705}, "9486.0": {"P": 0.02633}, "10900.0": {"P": 0.02553}, "12520.0": {"P": 0.02466}, "14380.0": {"P": 0.02373}, "16510.0": {"P": 0.02274}, "18960.0": {"P": 0.02172}, "21780.0": {"P": 0.02066}, "25020.0": {"P": 0.01959}, "28740.0": {"P": 0.0185}, "33010.0": {"P": 0.01742}, "37910.0": {"P": 0.01634}, "43550.0": {"P": 0.01528}, "50020.0": {"P": 0.01425}, "57450.0": {"P": 0.01325}, "65990.0": {"P": 0.01229}, "75800.0": {"P": 0.01136}, "87060.0": {"P": 0.01048}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2492, "q": 0.0756, "mu": 1.431, "epsilonL": 9.361e-05, "Eth": 112.6}, "E_min": 112.6, "E_max": 100000}}]}