pwiDB

Plasma-Surface Interaction Data Set 484

Sputtering of Kr⁺ on Ir(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Ir(pc) at 300 K

angle = 0.0 deg	E /eV	P
	31.04	0.0
	36.6	0.0001129
	43.16	0.0007932
	50.89	0.00288
	60.01	0.007951
	70.77	0.01874
	83.45	0.03943
	98.41	0.0754
	116.0	0.1316
	136.8	0.2096
	161.4	0.3061
	190.3	0.4137
	224.4	0.5249
	264.6	0.6352
	312.0	0.7434
	368.0	0.8506
	433.9	0.9584
	511.7	1.069
	603.4	1.184
	711.5	1.304
	839.0	1.431
	989.4	1.565
	1167.0	1.708
	1376.0	1.859
	1622.0	2.019
	1913.0	2.188
	2256.0	2.367
	2660.0	2.554
	3137.0	2.75
	3699.0	2.954
	4362.0	3.167
	5144.0	3.387
	6066.0	3.614
	7153.0	3.846
	8435.0	4.084
	9947.0	4.326
	11730.0	4.571
	13830.0	4.818
	16310.0	5.064
	19230.0	5.309
	22680.0	5.551
	26750.0	5.787
	31540.0	6.017
	37190.0	6.238
	43860.0	6.449
	51720.0	6.646
	60980.0	6.828
	71910.0	6.992
	84800.0	7.135

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1117
q = 19.11
mu = 2.295
epsilonL = 1.518e-06
Eth = 31.04

Fit range

E = 31.04 – 100000