{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1117, "q": 19.11, "mu": 2.295, "epsilonL": 1.518e-06, "Eth": 31.04}, "E_min": 31.04, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
31.04	0.0	
36.6	0.0001129	
43.16	0.0007932	
50.89	0.00288	
60.01	0.007951	
70.77	0.01874	
83.45	0.03943	
98.41	0.0754	
116.0	0.1316	
136.8	0.2096	
161.4	0.3061	
190.3	0.4137	
224.4	0.5249	
264.6	0.6352	
312.0	0.7434	
368.0	0.8506	
433.9	0.9584	
511.7	1.069	
603.4	1.184	
711.5	1.304	
839.0	1.431	
989.4	1.565	
1167.0	1.708	
1376.0	1.859	
1622.0	2.019	
1913.0	2.188	
2256.0	2.367	
2660.0	2.554	
3137.0	2.75	
3699.0	2.954	
4362.0	3.167	
5144.0	3.387	
6066.0	3.614	
7153.0	3.846	
8435.0	4.084	
9947.0	4.326	
11730.0	4.571	
13830.0	4.818	
16310.0	5.064	
19230.0	5.309	
22680.0	5.551	
26750.0	5.787	
31540.0	6.017	
37190.0	6.238	
43860.0	6.449	
51720.0	6.646	
60980.0	6.828	
71910.0	6.992	
84800.0	7.135	
-----