{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"31.04": {"P": 0}, "36.6": {"P": 0.0001129}, "43.16": {"P": 0.0007932}, "50.89": {"P": 0.00288}, "60.01": {"P": 0.007951}, "70.77": {"P": 0.01874}, "83.45": {"P": 0.03943}, "98.41": {"P": 0.0754}, "116.0": {"P": 0.1316}, "136.8": {"P": 0.2096}, "161.4": {"P": 0.3061}, "190.3": {"P": 0.4137}, "224.4": {"P": 0.5249}, "264.6": {"P": 0.6352}, "312.0": {"P": 0.7434}, "368.0": {"P": 0.8506}, "433.9": {"P": 0.9584}, "511.7": {"P": 1.069}, "603.4": {"P": 1.184}, "711.5": {"P": 1.304}, "839.0": {"P": 1.431}, "989.4": {"P": 1.565}, "1167.0": {"P": 1.708}, "1376.0": {"P": 1.859}, "1622.0": {"P": 2.019}, "1913.0": {"P": 2.188}, "2256.0": {"P": 2.367}, "2660.0": {"P": 2.554}, "3137.0": {"P": 2.75}, "3699.0": {"P": 2.954}, "4362.0": {"P": 3.167}, "5144.0": {"P": 3.387}, "6066.0": {"P": 3.614}, "7153.0": {"P": 3.846}, "8435.0": {"P": 4.084}, "9947.0": {"P": 4.326}, "11730.0": {"P": 4.571}, "13830.0": {"P": 4.818}, "16310.0": {"P": 5.064}, "19230.0": {"P": 5.309}, "22680.0": {"P": 5.551}, "26750.0": {"P": 5.787}, "31540.0": {"P": 6.017}, "37190.0": {"P": 6.238}, "43860.0": {"P": 6.449}, "51720.0": {"P": 6.646}, "60980.0": {"P": 6.828}, "71910.0": {"P": 6.992}, "84800.0": {"P": 7.135}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1117, "q": 19.11, "mu": 2.295, "epsilonL": 1.518e-06, "Eth": 31.04}, "E_min": 31.04, "E_max": 100000}}]}