pwiDB

Plasma-Surface Interaction Data Set 483

Sputtering of Ar⁺ on Ir(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Ir(pc) at 300 K

angle = 0.0 deg	E /eV	P
	27.76	1.674e-37
	32.81	0.0001508
	38.78	0.0009914
	45.83	0.003449
	54.17	0.009187
	64.02	0.0209
	75.67	0.0423
	89.43	0.07734
	105.7	0.1283
	124.9	0.1939
	147.7	0.2692
	174.5	0.3481
	206.3	0.4264
	243.8	0.5021
	288.1	0.5756
	340.5	0.648
	402.5	0.7205
	475.7	0.7944
	562.2	0.8705
	664.5	0.9496
	785.4	1.032
	928.2	1.118
	1097.0	1.208
	1297.0	1.302
	1533.0	1.4
	1811.0	1.501
	2141.0	1.605
	2530.0	1.713
	2991.0	1.823
	3535.0	1.936
	4177.0	2.05
	4937.0	2.165
	5836.0	2.28
	6897.0	2.395
	8152.0	2.51
	9635.0	2.622
	11390.0	2.731
	13460.0	2.837
	15910.0	2.938
	18800.0	3.033
	22220.0	3.121
	26260.0	3.202
	31040.0	3.273
	36690.0	3.334
	43360.0	3.384
	51250.0	3.421
	60570.0	3.444
	71590.0	3.453
	84610.0	3.447

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.107
q = 8.829
mu = 2.205
epsilonL = 3.889e-06
Eth = 27.76

Fit range

E = 27.76 – 100000