{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"27.76": {"P": 1.674e-37}, "32.81": {"P": 0.0001508}, "38.78": {"P": 0.0009914}, "45.83": {"P": 0.003449}, "54.17": {"P": 0.009187}, "64.02": {"P": 0.0209}, "75.67": {"P": 0.0423}, "89.43": {"P": 0.07734}, "105.7": {"P": 0.1283}, "124.9": {"P": 0.1939}, "147.7": {"P": 0.2692}, "174.5": {"P": 0.3481}, "206.3": {"P": 0.4264}, "243.8": {"P": 0.5021}, "288.1": {"P": 0.5756}, "340.5": {"P": 0.648}, "402.5": {"P": 0.7205}, "475.7": {"P": 0.7944}, "562.2": {"P": 0.8705}, "664.5": {"P": 0.9496}, "785.4": {"P": 1.032}, "928.2": {"P": 1.118}, "1097.0": {"P": 1.208}, "1297.0": {"P": 1.302}, "1533.0": {"P": 1.4}, "1811.0": {"P": 1.501}, "2141.0": {"P": 1.605}, "2530.0": {"P": 1.713}, "2991.0": {"P": 1.823}, "3535.0": {"P": 1.936}, "4177.0": {"P": 2.05}, "4937.0": {"P": 2.165}, "5836.0": {"P": 2.28}, "6897.0": {"P": 2.395}, "8152.0": {"P": 2.51}, "9635.0": {"P": 2.622}, "11390.0": {"P": 2.731}, "13460.0": {"P": 2.837}, "15910.0": {"P": 2.938}, "18800.0": {"P": 3.033}, "22220.0": {"P": 3.121}, "26260.0": {"P": 3.202}, "31040.0": {"P": 3.273}, "36690.0": {"P": 3.334}, "43360.0": {"P": 3.384}, "51250.0": {"P": 3.421}, "60570.0": {"P": 3.444}, "71590.0": {"P": 3.453}, "84610.0": {"P": 3.447}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.107, "q": 8.829, "mu": 2.205, "epsilonL": 3.889e-06, "Eth": 27.76}, "E_min": 27.76, "E_max": 100000}}]}