{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.107, "q": 8.829, "mu": 2.205, "epsilonL": 3.889e-06, "Eth": 27.76}, "E_min": 27.76, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
27.76	1.674e-37	
32.81	0.0001508	
38.78	0.0009914	
45.83	0.003449	
54.17	0.009187	
64.02	0.0209	
75.67	0.0423	
89.43	0.07734	
105.7	0.1283	
124.9	0.1939	
147.7	0.2692	
174.5	0.3481	
206.3	0.4264	
243.8	0.5021	
288.1	0.5756	
340.5	0.648	
402.5	0.7205	
475.7	0.7944	
562.2	0.8705	
664.5	0.9496	
785.4	1.032	
928.2	1.118	
1097.0	1.208	
1297.0	1.302	
1533.0	1.4	
1811.0	1.501	
2141.0	1.605	
2530.0	1.713	
2991.0	1.823	
3535.0	1.936	
4177.0	2.05	
4937.0	2.165	
5836.0	2.28	
6897.0	2.395	
8152.0	2.51	
9635.0	2.622	
11390.0	2.731	
13460.0	2.837	
15910.0	2.938	
18800.0	3.033	
22220.0	3.121	
26260.0	3.202	
31040.0	3.273	
36690.0	3.334	
43360.0	3.384	
51250.0	3.421	
60570.0	3.444	
71590.0	3.453	
84610.0	3.447	
-----