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Plasma-Surface Interaction Data Set 477

Sputtering of H+ on Ir(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Ir(pc) at 300 K

angle = 0.0 deg E /eV P
367.30.0
411.91.424e-05
461.85.689e-05
517.80.0001377
580.50.0002687
650.90.0004615
729.80.0007227
818.30.00105
917.50.001431
1029.00.001841
1153.00.002252
1293.00.002639
1450.00.002982
1626.00.003274
1823.00.003513
2044.00.003702
2292.00.003846
2569.00.003954
2881.00.004029
3230.00.004078
3622.00.004104
4061.00.004111
4553.00.004101
5105.00.004076
5724.00.004038
6418.00.003987
7196.00.003925
8068.00.003853
9046.00.003771
10140.00.003681
11370.00.003583
12750.00.003478
14300.00.003367
16030.00.003251
17970.00.00313
20150.00.003007
22590.00.002881
25330.00.002754
28400.00.002625
31850.00.002498
35710.00.002371
40040.00.002245
44890.00.002122
50330.00.002001
56430.00.001884
63270.00.00177
70950.00.00166
79550.00.001554
89190.00.001452

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 367.3 – 100000