{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"367.3": {"P": 0}, "411.9": {"P": 1.424e-05}, "461.8": {"P": 5.689e-05}, "517.8": {"P": 0.0001377}, "580.5": {"P": 0.0002687}, "650.9": {"P": 0.0004615}, "729.8": {"P": 0.0007227}, "818.3": {"P": 0.00105}, "917.5": {"P": 0.001431}, "1029.0": {"P": 0.001841}, "1153.0": {"P": 0.002252}, "1293.0": {"P": 0.002639}, "1450.0": {"P": 0.002982}, "1626.0": {"P": 0.003274}, "1823.0": {"P": 0.003513}, "2044.0": {"P": 0.003702}, "2292.0": {"P": 0.003846}, "2569.0": {"P": 0.003954}, "2881.0": {"P": 0.004029}, "3230.0": {"P": 0.004078}, "3622.0": {"P": 0.004104}, "4061.0": {"P": 0.004111}, "4553.0": {"P": 0.004101}, "5105.0": {"P": 0.004076}, "5724.0": {"P": 0.004038}, "6418.0": {"P": 0.003987}, "7196.0": {"P": 0.003925}, "8068.0": {"P": 0.003853}, "9046.0": {"P": 0.003771}, "10140.0": {"P": 0.003681}, "11370.0": {"P": 0.003583}, "12750.0": {"P": 0.003478}, "14300.0": {"P": 0.003367}, "16030.0": {"P": 0.003251}, "17970.0": {"P": 0.00313}, "20150.0": {"P": 0.003007}, "22590.0": {"P": 0.002881}, "25330.0": {"P": 0.002754}, "28400.0": {"P": 0.002625}, "31850.0": {"P": 0.002498}, "35710.0": {"P": 0.002371}, "40040.0": {"P": 0.002245}, "44890.0": {"P": 0.002122}, "50330.0": {"P": 0.002001}, "56430.0": {"P": 0.001884}, "63270.0": {"P": 0.00177}, "70950.0": {"P": 0.00166}, "79550.0": {"P": 0.001554}, "89190.0": {"P": 0.001452}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4857, "q": 0.0108, "mu": 1.711, "epsilonL": 9.618e-05, "Eth": 367.3}, "E_min": 367.3, "E_max": 100000}}]}