{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of H+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4857, "q": 0.0108, "mu": 1.711, "epsilonL": 9.618e-05, "Eth": 367.3}, "E_min": 367.3, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
367.3	0.0	
411.9	1.424e-05	
461.8	5.689e-05	
517.8	0.0001377	
580.5	0.0002687	
650.9	0.0004615	
729.8	0.0007227	
818.3	0.00105	
917.5	0.001431	
1029.0	0.001841	
1153.0	0.002252	
1293.0	0.002639	
1450.0	0.002982	
1626.0	0.003274	
1823.0	0.003513	
2044.0	0.003702	
2292.0	0.003846	
2569.0	0.003954	
2881.0	0.004029	
3230.0	0.004078	
3622.0	0.004104	
4061.0	0.004111	
4553.0	0.004101	
5105.0	0.004076	
5724.0	0.004038	
6418.0	0.003987	
7196.0	0.003925	
8068.0	0.003853	
9046.0	0.003771	
10140.0	0.003681	
11370.0	0.003583	
12750.0	0.003478	
14300.0	0.003367	
16030.0	0.003251	
17970.0	0.00313	
20150.0	0.003007	
22590.0	0.002881	
25330.0	0.002754	
28400.0	0.002625	
31850.0	0.002498	
35710.0	0.002371	
40040.0	0.002245	
44890.0	0.002122	
50330.0	0.002001	
56430.0	0.001884	
63270.0	0.00177	
70950.0	0.00166	
79550.0	0.001554	
89190.0	0.001452	
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