pwiDB

Plasma-Surface Interaction Data Set 476

Sputtering of Xe⁺ on Os(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Os(pc) at 300 K

angle = 0.0 deg	E /eV	P
	40.4	8.556e-42
	47.39	4.306e-05
	55.58	0.0003403
	65.19	0.001329
	76.46	0.003885
	89.68	0.009652
	105.2	0.02147
	123.4	0.04373
	144.7	0.08205
	169.7	0.1416
	199.1	0.2244
	233.5	0.3264
	273.8	0.4399
	321.2	0.5568
	376.7	0.6723
	441.8	0.7852
	518.2	0.8968
	607.8	1.009
	712.9	1.124
	836.1	1.243
	980.7	1.369
	1150.0	1.502
	1349.0	1.643
	1582.0	1.793
	1856.0	1.953
	2177.0	2.123
	2553.0	2.303
	2995.0	2.493
	3512.0	2.694
	4120.0	2.906
	4832.0	3.128
	5667.0	3.36
	6647.0	3.602
	7796.0	3.854
	9144.0	4.114
	10730.0	4.383
	12580.0	4.658
	14750.0	4.94
	17300.0	5.227
	20300.0	5.517
	23810.0	5.81
	27920.0	6.104
	32750.0	6.397
	38410.0	6.686
	45050.0	6.972
	52840.0	7.25
	61980.0	7.52
	72690.0	7.778
	85260.0	8.023

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1751
q = 23.52
mu = 2.46
epsilonL = 8.262e-07
Eth = 40.4

Fit range

E = 40.4 – 100000