{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"40.4": {"P": 8.556e-42}, "47.39": {"P": 4.306e-05}, "55.58": {"P": 0.0003403}, "65.19": {"P": 0.001329}, "76.46": {"P": 0.003885}, "89.68": {"P": 0.009652}, "105.2": {"P": 0.02147}, "123.4": {"P": 0.04373}, "144.7": {"P": 0.08205}, "169.7": {"P": 0.1416}, "199.1": {"P": 0.2244}, "233.5": {"P": 0.3264}, "273.8": {"P": 0.4399}, "321.2": {"P": 0.5568}, "376.7": {"P": 0.6723}, "441.8": {"P": 0.7852}, "518.2": {"P": 0.8968}, "607.8": {"P": 1.009}, "712.9": {"P": 1.124}, "836.1": {"P": 1.243}, "980.7": {"P": 1.369}, "1150.0": {"P": 1.502}, "1349.0": {"P": 1.643}, "1582.0": {"P": 1.793}, "1856.0": {"P": 1.953}, "2177.0": {"P": 2.123}, "2553.0": {"P": 2.303}, "2995.0": {"P": 2.493}, "3512.0": {"P": 2.694}, "4120.0": {"P": 2.906}, "4832.0": {"P": 3.128}, "5667.0": {"P": 3.36}, "6647.0": {"P": 3.602}, "7796.0": {"P": 3.854}, "9144.0": {"P": 4.114}, "10730.0": {"P": 4.383}, "12580.0": {"P": 4.658}, "14750.0": {"P": 4.94}, "17300.0": {"P": 5.227}, "20300.0": {"P": 5.517}, "23810.0": {"P": 5.81}, "27920.0": {"P": 6.104}, "32750.0": {"P": 6.397}, "38410.0": {"P": 6.686}, "45050.0": {"P": 6.972}, "52840.0": {"P": 7.25}, "61980.0": {"P": 7.52}, "72690.0": {"P": 7.778}, "85260.0": {"P": 8.023}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1751, "q": 23.52, "mu": 2.46, "epsilonL": 8.262e-07, "Eth": 40.4}, "E_min": 40.4, "E_max": 100000}}]}