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Plasma-Surface Interaction Data Set 468

Sputtering of H+ on Os(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Os(pc) at 300 K

angle = 0.0 deg E /eV P
458.61.963e-24
511.83.107e-05
571.38.985e-05
637.60.0001771
711.70.0002964
794.40.0004504
886.70.0006398
989.70.0008622
1105.00.001112
1233.00.001379
1376.00.001653
1536.00.001923
1714.00.002178
1914.00.00241
2136.00.002613
2384.00.002787
2661.00.002929
2970.00.003043
3315.00.00313
3700.00.003192
4130.00.003232
4610.00.003252
5145.00.003256
5743.00.003244
6410.00.00322
7154.00.003183
7985.00.003135
8913.00.003078
9948.00.003013
11100.00.002941
12390.00.002862
13830.00.002778
15440.00.002689
17230.00.002596
19240.00.0025
21470.00.002402
23960.00.002302
26750.00.002201
29850.00.002101
33320.00.002
37190.00.0019
41510.00.001802
46340.00.001705
51720.00.001611
57730.00.001519
64430.00.00143
71920.00.001344
80270.00.001261
89590.00.001181

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 458.6 – 100000