{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}], "json_data": [{"x1": {"name": "angle", "units": "deg", "value": 0}, "x2": {"name": "E", "units": "eV", "data": {"458.6": {"P": 1.963e-24}, "511.8": {"P": 3.107e-05}, "571.3": {"P": 8.985e-05}, "637.6": {"P": 0.0001771}, "711.7": {"P": 0.0002964}, "794.4": {"P": 0.0004504}, "886.7": {"P": 0.0006398}, "989.7": {"P": 0.0008622}, "1105.0": {"P": 0.001112}, "1233.0": {"P": 0.001379}, "1376.0": {"P": 0.001653}, "1536.0": {"P": 0.001923}, "1714.0": {"P": 0.002178}, "1914.0": {"P": 0.00241}, "2136.0": {"P": 0.002613}, "2384.0": {"P": 0.002787}, "2661.0": {"P": 0.002929}, "2970.0": {"P": 0.003043}, "3315.0": {"P": 0.00313}, "3700.0": {"P": 0.003192}, "4130.0": {"P": 0.003232}, "4610.0": {"P": 0.003252}, "5145.0": {"P": 0.003256}, "5743.0": {"P": 0.003244}, "6410.0": {"P": 0.00322}, "7154.0": {"P": 0.003183}, "7985.0": {"P": 0.003135}, "8913.0": {"P": 0.003078}, "9948.0": {"P": 0.003013}, "11100.0": {"P": 0.002941}, "12390.0": {"P": 0.002862}, "13830.0": {"P": 0.002778}, "15440.0": {"P": 0.002689}, "17230.0": {"P": 0.002596}, "19240.0": {"P": 0.0025}, "21470.0": {"P": 0.002402}, "23960.0": {"P": 0.002302}, "26750.0": {"P": 0.002201}, "29850.0": {"P": 0.002101}, "33320.0": {"P": 0.002}, "37190.0": {"P": 0.0019}, "41510.0": {"P": 0.001802}, "46340.0": {"P": 0.001705}, "51720.0": {"P": 0.001611}, "57730.0": {"P": 0.001519}, "64430.0": {"P": 0.00143}, "71920.0": {"P": 0.001344}, "80270.0": {"P": 0.001261}, "89590.0": {"P": 0.001181}}}, "fit": {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.5133, "q": 0.0089, "mu": 1.302, "epsilonL": 9.784e-05, "Eth": 458.6}, "E_min": 458.6, "E_max": 100000}}]}